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μ-Si strain gauge array on flexible substrate for dynamic pressure measurement

Abstract : Low Temperature μ-Si layers have been deposited by Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) to produce strain gauges. These strain gauges performed on 25 μm thick flexible Kapton Polyimide (PI) were investigated in terms of Gauge Factor but also in dynamic mode through a homemade pneumatic test bench. Best strain gauge design has been identified and subsequently used to perform a 25 sensor array which was also tested using pulses and more complex signals. A simulation of blood pressure monitoring was performed to demonstrate the value of the technology.
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https://hal.archives-ouvertes.fr/hal-02960182
Contributor : Laurent Jonchère <>
Submitted on : Monday, January 18, 2021 - 12:59:07 PM
Last modification on : Tuesday, January 19, 2021 - 3:33:01 AM

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F. Garcia Castro, O. de Sagazan, N Coulon, A. Homs Corbera, D. Fassini, et al.. μ-Si strain gauge array on flexible substrate for dynamic pressure measurement. Sensors and Actuators A: Physical , Elsevier, 2020, 315, pp.112274. ⟨10.1016/j.sna.2020.112274⟩. ⟨hal-02960182v2⟩

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