Microwave steam diffusion (MSD) was developed as a cleaner and new process design and operation for isolation of essentials oils and was compared to conventional steam diffusion (SD). The essential oils extracted by MSD for 3 min were quantitatively (yield) and qualitatively (aromatic profile) similar to those obtained by conventional steam diffusion for 20 min. In addition, an optimal operating steam flow rate of 25 g min―1 and microwave power 200W were found to ensure complete extraction yield with reduced extraction time. To confirm the efficiency of this process a mathematical model was proposed to describe the mass transfer of essential oil from lavender. Solid-steam mass transfer coefficients obtained by MSD were six times higher than obtained by SD. Scanning electronic microscopy was used to confirm the extraction mechanism of the essential oil present in the glandular trichomes of the flowers from lavender outer surface. MSD was better than SD in terms of energy saving, cleanliness and reduced waste water.